What DSLR after a 20D???
No way can that small S95 be better than a 20D with expensive lenses. If it is, you're doing something wrong. One problem is that you apparently think that the camera is responsible for producing the photographs, and you want a new gadget that produces better photographs without considering your interaction with the camera.
The 7D is the equivalent upgrade to the 20D; same body shape, small updates, and same price point. The 5D is a different format, and its larger sensor is better in dim lighting conditions than the 7D's APS-C sensor, especially when using film speeds above 3200.
With seven years of experience, you should know what you're doing by now, and you should be able to make the best purchase decision yourself.