7D, 60D, Rebel T3i in terms of IQ only

In terms of image quality ONLY, for RAW files only, is there any difference between these three cameras:

Rebel T3i
60D
7D

? I believe they all use the same exact sensor, but I'm not sure if there are differing microlenses or processors among them that might affect IQ.

I am not concerned about the differences in the camera bodies themselves.

Thanks in advance,
Dan